Electrical Engineering/Data Science Graduation Internship: Temporal Control Using Exogenous Data

Are you a graduating bachelor or master student in Data Science, Physics, Electrical Engineering, Mathematics, or a related field? Do you possess strong programming skills and familiarity with signal processing and machine learning? If so, our graduation internship might be perfect for you!

Background Information

Department: BL-Apps MPC D&E PWC Overlay & Alignment

Group: Technology Enablers

Our team at Applications Process Window Control On-Product Performance is focused on enhancing on-product overlay control performance. This internship aligns with our roadmap of developing potential improved temporal control methods for future versions of our control software products.

Your Assignment

The primary objective is to enhance the time filter used for feedback control to improve on-product overlay. Currently, an Exponentially Weighted Moving Average is used to optimize wafer model parameters for correction. However, using more advanced temporal models has not yielded significant improvements. Instead, leveraging exogenous data to enrich model parameters and make predictions is advised (outcomes from a previous internship are available in a thesis).

Examples of exogenous data include:

• Overlay data statistics
• Context data (e.g., etcher chamber IDs)
• Reported scanner data (e.g., reticle alignment parameters, wafer alignment results, exposure timing information)
• Fab logistics information

Your work will involve writing a test plan, collecting relevant datasets, developing tooling for various potential temporal control models, performing proof book analysis, and documenting your findings. The ultimate goal is to guide our overlay control competence in determining the potential benefits and most promising methods for temporal control enhancements.

Your Profile

To be an ideal candidate for this internship, you should:

• Be a graduating bachelor or master student in Data Science, Physics, Electrical Engineering, Mathematics, or a related field.
• Have proficiency in Matlab or Python (or both).
• Have a strong understanding of signal processing, Fourier analysis, machine learning, auto-regression models, Kalman filters, and time-series prediction.
• Be proactive and capable of working independently.
• Possess excellent communication skills in English, both verbally and in writing.

This internship requires a minimum commitment of 6 months, with 4-5 days of work per week, starting as soon as possible. Note that students must be enrolled at an educational institution for the entire duration of the internship.

Change the World – One Nanometer at a Time

Join ASML as an intern and gain valuable experience in a highly innovative environment. You will receive a monthly internship allowance of up to €600, along with potential housing support and free public transport. Additionally, you’ll benefit from practical guidance by experts and experience the dynamic atmosphere of a leading Dutch company in the global industry.

About ASML

ASML is a high-tech company headquartered in the Netherlands, manufacturing complex lithography machines used by chipmakers to produce integrated circuits. Our innovations are at the core of the electronic devices that keep us connected. ASML employs some of the most creative minds in fields like physics, electrical engineering, mathematics, chemistry, mechatronics, optics, mechanical engineering, and computer science.

We are committed to continuous improvement, fostering innovation, and embracing challenges. Our global team of approximately 39,000 individuals from 140 different nationalities operates across Europe, Asia, and the US, with our main hub in the Brainport Eindhoven region in the Netherlands.

Students - Get Ready for Real-World R&D

An internship at ASML not only introduces you to the world of industrial-strength R&D but also helps you discover your passions. Whether you design parts of machines, ensure they meet specifications, write performance-optimizing software, or collaborate with customer engineers, you’ll play a pivotal role in our progress.

ASML - Be Part of Progress

Diversity and Inclusion

ASML is an Equal Opportunity Employer that values diversity and inclusion. We recruit, hire, train, and promote individuals in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that diversity and inclusion drive our success.

Need to